｜卷式鍍膜設備開發技術

摘要：卷式鍍膜設備是一種以物理蒸鍍方式進行鍍膜於軟性材料的設備技術，其主要應用於開發軟性材料（塑膠材料：例如PI、PET，金屬材料：例如鋁箔，銅箔等）的鍍膜設備，軟性電子應用於各種商品，例如軟性電路版，觸控螢幕的透明導電膜，軟性顯示器等。

目前國內可撓式薄膜產品所使用的材料與卷式鍍膜設備大多由美、德、日掌控，售價動輒上億元新台幣，金屬中心以自主發展整合相關模組技術，成功完成卷式鍍膜量產系統之設計。進一步串聯整合及協助國內加工廠商建立次系統供應鏈體系（如靶源精密加工、磁控濺射源、真空腔體、真空電引入等），開發出國內具壓差真空腔體、軟板傳輸及透明導電膜（TCO）鍍膜模組系統。

Abstract: Roll-to-roll coating equipment technology is the technology for physical vapor deposition (PVD) process to deposit the coating films on flexible substrate which is mainly applied for the development of flexible materials (plastic materials such as PI、PET，metal materials, such as aluminum and copper foil). Flexible electronics products have been applied on various commercial products, such as flexible circuit board, transparent conducting oxides (TCO) films for touch control screen and flexible displays, etc.

Most of the TCO film materials and roll-to-roll coating equipments imported almost from overseas developed country like USA, Germany or Japan. Each commercial roll-to-roll coating equipment costed domestic company at least several hundreds of millions NT dollars. MIRDC has now self-developed and integrated the related module technologies, and successfully accomplished the design of the roll-to-roll coating film mass production system and further combine, integrate and assist the domestic manufacturers establish the sub-system supply chain system (such as precious machining, sputtering sources, vacuum chamber manufacturing and electric feeding through components) and develop the Taiwan-made module system with differential pressure vacuum chamber、flexible transmission and transparent conducting oxides (TCO) coating films.

關鍵詞：真空濺鍍、可撓式基板、卷鍍設備

Keywords：Sputter, flexible substrate, roll-to-roll coating equipment

前言
軟性電子（Flexible Electronics）技術將元件與電路製造及放置在軟性基板上，讓終端產品具備柔軟及可彎曲等特性，實現了輕、薄、短、小等符合人性化與方便性的需求趨勢，帶給產業變革性的創新應用發展。軟性電子應用領域相當廣泛，電子書、超薄手機、可撓式顯示器、拋棄式電子產品、貼身穿戴式產品、Smart Card等產品皆與軟性電子息息相關。

軟性電子由於可撓曲特性，因此一般常以卷對卷的製程方式進行，該製程對於後端製程的應用也較為廣泛，未來甚至後端的圖案化製程也會趨向於卷對卷的生產設備方式達到量產規模。目前國內之可撓式薄膜產品所使用的材料與卷式鍍膜設備大多由美、德、日掌控[1]。

金屬中心以科專計畫所發展之真空抽氣系統、節流閥及濺鍍設備等之專利技術，再整合捲軸式送料定張力調控模組控制，以一年半時間開發完成國內自主設計及製造之具壓差之真空腔體、軟板傳輸及TCO鍍膜模組系統，同時本系統目前正進行各種透明導電膜及其他功能性鍍膜開發，因應未來台灣觸控、軟性電子、太陽能產業之軟硬體需求。