半導體真空泵餘命分析模組 2023/07/13

簡介 Introductions

• 半導體真空泵智慧監診方案，整合泵浦自身運轉狀態以及迴轉件產生的振動訊號，透過一種新穎的設備健康指標(台灣及美國專利)進行運轉狀態識別，提升泵浦使用週期且適時地更換泵浦。
• The semiconductor vacuum pump smart monitoring solution integrates the pump's own operating status and the vibration signal generated by the rotating parts, and uses a novel equipment health indicator (Taiwan and US patent) to identify the operating status, improve the pump life cycle and replace the pump in a timely manner .

特色與創新 Characters and Innovations

• 自動預估設備使用餘命。
• 避免設備無預警停機。
• 延長平均故障時間。
• 簡單且直觀的指標依據。
• Automatic analysis to indicate remaining life.
• Avoid equipment downtime without warning.
• Extending mean time to failure.
• Based on simple and intuitive indicator.

應用與效益 Applications and Benefits

• 提供可靠且計劃性換機依據。
• 減少製程設備redundant 50%。
• 減少設備巡檢人力成本25% 。
• 預防產品報廢損失千萬/年等級，並提升製程生產效率。
• Provides basis for reliable and planned machine replacement.
• Reduce process equipment redundancy by 50%.
• Reduce equipment inspection labor costs by 25%.
• Prevents loss of tens of millions per year from product scrapping, and improves production process efficiency.

聯絡 contact

• 許銘翔  Ming-Hsiang Hsu
• TEL: 886-3-5912267
• FAX: 886-3-5826554
• E-mail: MH_HSU@itri.org.tw

真空泵訊號量測單元 Vacuum Pump Signal Measurement Unit

設備狀態監測平台 Equipment Status Monitoring Platform

設備餘命分析趨勢 Equipment RUL Trend Line