簡介 Introductions

目前精密鍍膜國內自主化技術正待建立，亟需解決 ALD產能慢與 PECVD 薄膜緻密性低之問題，另多重物理耦合結合 AI 技術，以降低設計模型的不確定性和搜尋最佳製程參數，協助工程師加速設定製程參數的時間，提升Time-To-Market 的能力，優化縮短設備模組開發時程。

The current domestic precision coating technology is yet to be established for the urgent need to solve the slow production of ALD and PECVD film low density problems. Combining AI technology with multiple physical couplings reduces model uncertainty and searches for the best process parameters, assists engineers in accelerating the time to set process parameters, improves the ability of Time-To-Market. and optimize equipment module design.

特色與創新 Characters and Innovations

• 整合「多重物理耦合技術」，研發「表面化學反應路徑決策技術」，精簡化學反應式，縮短分析模擬時間及提昇模擬分析之準確度。如開發 ALD+PECVD 複合鍍膜製程設備，鍍超薄複合薄膜結構 ( 膜厚 <10nm) 達到晶體複合結構功能或隔絕層需求。其薄膜厚度不均勻性≦ 3% ，奈米堆疊 (nano-laminat) 水氣穿透率(WVTR) ≦ 5x10-6g/m2.day.。
• Integrate “multiple physical coupling technology” and develop “surface chemical reaction path decision technology”. Simplify the learning reaction formula, shorten the analysis simulation time and improve the accuracy of the simulation analysis. . Development of ALD + PECVD composite coating process equipment, plating thin composite film structure (film thickness <10nm) to achieve the function of crystalline composite structure or insulation layer. The thickness of the film is less than 3%, the moisture vapor transmission rate is less than or equal to 5x10-6g/m2.day.

應用與效益 Applications and Benefits

• 創新 ALD+PECVD 專利鍍膜設備兼顧產能與薄膜緻密性，符合高規的 3C 鍍膜產品開發。此模擬器技術可應用於光電半導體產業之鍍膜製程上，可掌控高亮度 LED、大功率、無線通信等光電元件的品質，亦可用於其他半導體、太陽能產業等薄膜製程和設備（如PECVD，PVD）上。
• Innovative ALD + PECVD patented coating equipment to make capacity and film densification both to improve for the 3C coating product. This simulator technology can be useed to the optoelectronic semiconductor industry to control the quality of optoelectronic component. It can also be used in other thin-film processes (such as PECVD, PVD) in the semiconductor and solar industries.

聯絡 contact

• 梁沐旺 Muh-Wang Liang
• E-mail:MWLiang@itri.org.tw
• TEL:886-3-5916567
• FAX:886-3-5910350

更多資訊

• 更多技術內容：https://www.automan.tw/aboutus/annual-report.aspx
• YouTube技術影片：https://www.youtube.com/channel/UCU3037vDY8r0m_rJ_U7lHvQ

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