自校型溫度感測器應用於主軸即時溫度校正研究

工具機產業為我國主要機械設備製造業出口之一，2019年至2023年我國工具機產業的年平均出口值達873億新臺幣[1]。在工具機切削過程中，有40 %至70 %的加工誤差是由熱變形引起的[2]，因此如何即時掌握熱變位補償相關的溫度準確度就成為確保所需精度的關鍵之一。目前在工具機的溫度感測器缺乏線上校正方案，加工期間可能因溫度漂移造成品質難以掌控，品檢需停機、拆裝與後送校正實驗室，整體耗時可達12天以上。本文將利用微型定點囊的技術，發展自校型溫度感測器可滿足工具機線上溫度校正之需求，實現溫度領域新的標準傳遞方式，改善廠商或使用者在校正所需的成本及時間。

The machine tool industry is one of major machinery and equipment manufacturing exports in Taiwan. From 2019 to 2023, the average annual export value of the machine tool industry reached NT$87.3 billion. During machine tool cutting processes, about 40 % to 70 % of machining error is caused by thermal deformation. Therefore, how to instantly master the temperature accuracy related to thermal displacement compensation has become one of the keys to ensuring the required precision. Currently, there is a lack of in-situ calibration solutions for temperature sensors in machine tools, and it is difficult to control quality due to temperature drift during processing. Quality inspection requires shutting down, disassembling, and sending to a calibration laboratory, which can take up to 12 days in total. This article will use the technique of miniature fixed-point cells to develop the self-calibrating temperature sensor that can meet the needs of in-situ temperature calibration of machine tools, realize a new way to transfer temperature standard, and improve the cost and required time of calibration for manufacturers or users.